Covers fundamental methods for statistical monitoring of processes, including Shewhart control charts, control charts for individual measurements, CUSUM charts and attribute control charts. Explores the design of experiments, including the statistical evaluation of main and interaction effects, as well as intelligent experimentation through reduced factorial experimental design. Outlines DOE-based search techniques for surface response based design optimization. Offers advanced research in model based and active process control in highly flexible and sophisticated manufacturing systems, such as semiconductor manufacturing lithography of flexible automotive assembly lines.